低温沉积ITO透明导电膜的研究

1.北京航空材料研究院,北京,100095

2.北京航空材料研究院,北京,100095

3.北京航空材料研究院,北京,100095

Investigation of Sputting Coating ITO Transparent Electrconductive Film at Lower Temperature

通过探讨半导体氧化物ITO膜的透光和导电机理,用反应性直流磁控溅射的镀膜工艺,在有机玻璃上低温镀制(ITO)膜,研究ITO膜溅射工艺参数与透光和导电性能的关系,实现了在低温下镀制(ITO)膜的技术,其透光率≥80%以上,表面电阻≤30Ω/□.

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