离子辅助轰击能量对类金刚石薄膜性能的影响

1.清华大学,北京,100084

2.清华大学,北京,100084

3.清华大学,北京,100084

4.清华大学,北京,100084

5.清华大学,北京,100084

基金项目: 国家自然科学基金(19672034;59735110)

Effect of Ion Bombardment Energy on the Properties of Diamond-like Carbon Film

研究了利用IBAD方法沉积类金刚石薄膜时,离子的辅助轰击能量对薄膜的微观结构、表面粗糙度、弹性、硬度以及摩擦系数的影响,获得了机械和摩擦性能优异的类金刚石薄膜.讨论了薄膜微观结构和性能之间的关系,分析了不同硬度测试方法的差异.

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