采用磁控溅射方法在40Gr不锈钢基体上,沉积了TiN及TiWN单层薄膜、TiN/MoS2及TiWN/MoS2双层薄膜,对比分析了薄膜的成分、相结构、微观形貌及摩擦学性能.结果表明:根据W含量的不同,TiWN薄膜中,Ti0.67W0.33N膜层具有较高的硬度和弹性模量;TiWN/MoS2薄膜中,TiWN层主要含有TiN和WN相,MoS2层含有MoS2和M0O3相;与TiN/MoS2薄膜比较,TiWN/M0S2薄膜具有更优异的减摩、耐磨性能,可减小材料的磨损,延长其使用寿命.
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