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应用射频磁控溅射技术在普通载玻片上镀制一层均匀的Ti-O薄膜,采用红外光谱仪对其进行红外吸收光谱分析,采用紫外光-可见光分光光度计测量其吸光度,得到了在不同O含量条件下制备的Ti-O薄膜对紫外光-可见光的吸收情况,并进行了比较.实验结果表明:随着O含量的逐渐减少,Ti-O薄膜的结构从TiO_2逐渐转变为多种Ti-O结构共存,并且其吸收峰出现红移现象.

The Ti-O films were coated on common glasses by RF magnetron sputtering technique. The absorption infrared spectrums of the Ti-O films were analyzed by infrared spectrometer. The absorbances of the Ti-O films were measured by uv-vis spectrophotometer, so we obtained and compared the absorption UV and visible spectrum of the Ti-O films with different oxygen content. The experiment results show that while the oxygen content decreases the compositions of the films are changed from TiO_2 to different structures of Ti-O and the absorption spectrum red-shifted of the Ti-O films happens.

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