由于超硬多层薄膜的性能随调制周期的变化而发生变化,在某一范围出现超硬等异常效应.其潜在的实际应用价值及理论意义,使其成为近年来人们研究的热点.本文综述了近年来国内外超硬多层薄膜的研究结果,介绍了其分类、主要性能特点以及制备工艺,并对超硬多层薄膜以后的发展趋势进行了展望.
参考文献
| [1] | 肖兴成,江伟辉,宋力昕,胡行方.超硬膜的研究进展[J].无机材料学报,1999(05):705-710. |
| [2] | Holleck H;Lahres M;Woll P .Multilayer coatings Influence of fabrication parameters on constitution and properties[J].Surface and Coatings Technology,1990,41(02):179-190. |
| [3] | 吕反修教授谈超硬薄膜（涂层）材料[J].中国表面工程,2003(04):49-49. |
| [4] | Chu X;Wong M S;Barnett S A et al.Deposition and Properties of Polycrystalline TiN/NbN Super--lattice Coatings[J].Journal of Vacuum Science and Technology,1992,10(04):1604-1611. |
| [5] | Chu X;Barnett S A;Wong M S et al.Reactive Un-balanced Magnetron Sputter Deposition of Polycrystalline TiN/NbN Super-lattice Coatings[J].Surface and Coatings Technology,1993,57(01):13-18. |
| [6] | Liu A Y;Cohen M L .Prediction of new low compressibility solids[J].Science,1989,245:841-842. |
| [7] | Liu A Y;Cohen M L .Structural properties and electronic structure of lowcompressibility materials: β-Si3N4 and hypothetical β-Si3N4[J].Physical Review B,1990,41:10727-10734. |
| [8] | 刘传胜,付强,叶明生,蒋昌忠,范湘军.用扫描电镜研究CNx/TiN涂层的摩擦磨损[J].电子显微学报,2003(04):323-326. |
| [9] | Miyoshi K.;Street Kenneth W.;Zabinski J.S.;Sanders J.H.;Voevodin A.A.;Wu R.L.C.;Pohlchuck B. .Sliding wear and fretting wear of diamondlike carbon-based, functionally graded nanocomposite coatings[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,1999(1):65-73. |
| [10] | 王静;何建立;李文治 等.IBAD合成CNx/NbN纳米多层膜[J].材料研究学报,1998,12(05):543-545. |
| [11] | 许俊华,李戈扬,顾明元.NbN/TaN纳米多层膜的微结构及超高硬度效应[J].无机材料学报,2000(03):561-564. |
| [12] | J. Musil .Hard and superhard nanocomposite coatings[J].Surface & Coatings Technology,2000(1/3):322-330. |
| [13] | Li D;Lin X W;Cheng S C et al.Synthesis of Super-hard Carbon Nitride Composite Coatings[J].Applied Physics Letters,1995,67(02):203-205. |
| [14] | P. Eh. Hovsepian;D. B. Lewis;W. -D. Munz .Recent progress in large scale manufacturing of multilayer/superlattice hard coatings[J].Surface & Coatings Technology,2000(0):166-175. |
| [15] | 许俊华;李戈扬;顾明元 .TaN/TiN和TaWN/TiN多晶超晶格薄膜的微结构与超硬效应[J].金属学报,1999,35(11):1214-1218. |
| [16] | Setoyama M;Nakayama A;Tanaka M et al.Formation of cubic-AlN in TiN/AlN super-lattice[J].Surface and Coatings Technology,1996,86/87:225-230. |
| [17] | Musil J;Polakova H .Hard nano-composite Zr-Y-N coatings, correlation between and structure[J].Surface and Coatings Technology,2000,127:99-106. |
| [18] | JING WANG;WEN-ZHI LI;HENG-DE LI .Preparation and characterization of superhard TiC/Mo multilayers[J].Journal of Materials Science,2000(11):2689-2693. |
| [19] | P. Holubar;M. Jilek;M. Sima .Present and possible future applications of superhard nanocomposite coatings[J].Surface & Coatings Technology,2000(0):145-151. |
| [20] | 吴大维.硬质薄膜材料的最新发展及应用[J].真空,2003(06):1-5. |
| [21] | Y. Lifshitz .Diamond-like carbon -- present status[J].Diamond and Related Materials,1999(8-9):1659-1676. |
| [22] | Robertson J .Properties of diamond-like carbon[J].Surface and Coatings Technology,1992,50(03):185-203. |
| [23] | Tay BK.;Tan HS.;Yang HS.;Sun Z.;Shi X. .Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc[J].Surface & Coatings Technology,1998(1/2):155-158. |
| [24] | Ager J W Ⅲ;Brown I G et al.Multilayer hard carbon films with low wear rates[J].Surface and Coatings Technology,1997,91:91-94. |
| [25] | Ziegele H;Scheibe HJ;Schultrich B .DLC and metallic nanometer multilayers deposited by laser-arc[J].Surface & Coatings Technology,1997(1/3):385-390. |
| [26] | Jianguo Deng;Manuel Braun .DLC multi-layer coatings for wear protection[J].Diamond and Related Materials,1995,4:936-943. |
| [27] | Ivanovsky G F;Sleptsov V V;Elinson V M et al.Properties of diamondlike films formed by ion-assisted methods for multilayer structures[J].Surface and Coatings Technology,1991,48(03):189-191. |
| [28] | Drees D;Celis J P;Dekem peneer E et al.Electrochemical and wear behavior of amorphous diamond-like carbon coatings and multi-layered coatings in aqueous environments[J].Surface and Coatings Technology,1996,86/87:159-163. |
| [29] | Holleck H;Schier V .Multilayer PVD coatings for wear protection[J].Surface and Coatings Technology,1995,76/77:328-336. |
| [30] | Bull S J;Jones A M .Multilayer coatings for improved performance[J].Surface and Coatings Technology,1996,78:173-184. |
| [31] | Voevodin A A;Walck S D;Zabinski J S .Architecture of multilayer nanocomposite coatings with super-hard diamond-like carbon layers for wear protection at high contact loads[J].WEAR,1997,203/204:516-527. |
| [32] | 孙明仁;夏立芳;孙跃 等.TiC-DLC梯度复合膜及其摩擦性能[J].材料科学与工艺,1999,7(01):17-21. |
| [33] | Voevodin AA.;Laube SJP.;Donley MS.;Zabinski JS.;Capano MA. .DESIGN OF A TI/TIC/DLC FUNCTIONALLY GRADIENT COATING BASED ON STUDIES OF STRUCTURAL TRANSITIONS IN TI-C THIN FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):107-115. |
| [34] | Voevodin A A;Zabinski J S .Super-hard,Functionally gradient,nanolayered and nano- composite diamond-like carbon coatings for wear proteetion[J].Diamond and Related Materials,1998,7(2-5):463-467. |
| [35] | Bull S J;Jones A M .Multilayer coatings for improved performance[J].Surface and Coatings Technology,1996,78:173-184. |
| [36] | Helmersson U;Todorova S;Barnett S A et al.Growth of single-crystal TiN/VN strained-lay super-lattices with extremely high mechanical hardness[J].Journal of Applied Physics,1987,62(02):481-484. |
| [37] | Mirkarimi P B;Hultman L;Barnett S A .Enhanced hardness in latticematched single-crystal TiN/V0.6Nb0.4N super-lattices[J].Applied Physics Letters,1990,57(25):2654-2656. |
| [38] | Shinn M;Hultman L;Barnett S A .Growth structure and micro-hardness of epitaxial TiN/NbN super-lattices[J].Journal of Materials Research,1992,7(04):901-911. |
| [39] | Barnett Scott A;Shinn Meenam .Plastic and elastic properties of compositionally modulated thin films[J].Annual Review of Materials Science,1994,24:481-511. |
| [40] | 赵红雨,范秋林,宋力昕,施尔畏,胡行方.纳米复合超硬薄膜的研究现状[J].无机材料学报,2004(01):9-16. |
| [41] | Ogwu A A;Lamberton R W;Morley S et al.Characterization of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by raman spectroscopy[J].Physical Review B,1999,269(03):335-344. |
| [42] | Neerinck D;Persoone P;Sercu M et al.Diamond like nano-composite coatings for low-wear and low-friction application in humid environments[J].Thin Solid Films,1998,317(1/2):402-404. |
| [43] | Donn;Belin M;Auge J C et al.Tribo- chemistry of diamond-like carbon coatings in various environments[J].Surface and Coatings Technology,1994,68/69:626-631. |
| [44] | 物理气相沉积技术的新进展[J].材料保护,2000(01):91-94. |
| [45] | 俞世吉;丁振峰;刘东平 等.CVD 和 PVD超硬涂层的研究进展[J].真空与低温,1999,5(03):157-166. |
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