PZT压电厚膜的研究现状与进展

硅酸盐通报 , 2006, 25(5): 103-107. doi: 10.3969/j.issn.1001-1625.2006.05.023

PZT压电厚膜的研究现状与进展

李传山 ^1, , 沈建兴 ^2, , 张雷 ^3, , 董金美 ^4,

1.山东轻工业学院材料科学与工程学院,济南,250100

2.山东轻工业学院材料科学与工程学院,济南,250100

3.山东轻工业学院材料科学与工程学院,济南,250100

4.山东轻工业学院材料科学与工程学院,济南,250100

基金项目: 山东省济南市科技发展基金(046039)

关键词： PZT , 压电厚膜 , 浆料 , 扩散 , 缓冲层

Status and Progress for Investigation of PZT Piezoelectric Thick Film

PZT压电厚膜材料具有良好的压电性能,它兼顾了块体材料和薄膜的优点,近年来得到了广泛的研究与应用.本文简述了制备PZT压电厚膜的制备方法及基板、电极材料的研究情况,讨论了目前制造PZT压电厚膜所存在的基板与厚膜之间的高温扩散以及丝网印刷用厚膜浆料难以分散均匀等共性问题,同时,就如何解决这些问题进行了评述.

参考文献

[1]	夏冬林,刘梅冬,徐慢,赵修建.PZT铁电薄、厚膜及其制备技术研究进展[J].材料导报,2004(10):64-67.
[2]	Koch M;Harris N;Maas R.A novel micropump design with thick-film piezoelectric actuation[J].Measurement Science and Technology,1997(08):49-57.
[3]	Kim SJ;Kang CY;Choi JW;Kim DY;Sung MY;Kim HJ;Yoon SJ .Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method[J].Materials Chemistry and Physics,2005(2/3):401-404.
[4]	H. Moilanen;S. Leppavuori .Laser interferometric measurement of displacement-field characteristics of piezoelectric actuators and actuator materials[J].Sensors and Actuators, A. Physical,2001(1/3):326-334.
[5]	Morten B;Cicco G D;Prudenziati M .Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films[J].Sensors and Actuators A-physical,1992,31:153-158.
[6]	S. P. Beeby;N. M. White .Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms[J].Sensors and Actuators, A. Physical,2001(3):189-197.
[7]	D. Crescini;D. Marioli;E. Sardini .Large bandwidth and thermal compensated piezoelectric thick-film acceleration transducer[J].Sensors and Actuators, A. Physical,2001(3):131-138.
[8]	De Cicco G.;Morten B.;Prudenziati M. .A new ultrasonic composite transducer implemented with thick filmtechnology[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,1997(5):992-996.
[9]	Harris N R;White N M .Practical properties of a thick-film elastic wave sensor structure[J].Sensors and Actuators,1999,76:83-88.
[10]	Zhu W.;Zhang Z.;Yao K. .Design and fabrication of a novel piezoelectric multilayer actuator by thick-film screen printing technology[J].Sensors and Actuators, A. Physical,2000(3):149-153.
[11]	Beeby SP;White NM;Blackburn A .Processing of PZT piezoelectric thick films on silicon for microelectromechanical systems[J].Journal of Micromechanics and Microengineering,1999(3):218-229.
[12]	Koch M;Harris N;Maas R et al.A novel micropump design with thick-film piezoelectric actuation[J].Meas Sci,1997,8:49-52.
[13]	Kobayashi M;Olding T R;Sayer M.Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique[J].ULTRASONICS,2002(39):675-680.
[14]	Liu J M;Xu S Y;Zhou W Z et al.Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition[J].Materials Science and Engineering A,1999,269:67-72.
[15]	陈超,褚家如,鲁健,杨艳.高取向PZT厚膜的0-3复合法制备[J].微纳电子技术,2003(07):499-502.
[16]	S. P. Beeby;N. J. Grabham;N. M. White .Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer[J].Sensors and Actuators, A. Physical,2001(1/3):168-174.
[17]	董显林.功能陶瓷研究进展与发展趋势[J].中国科学院院刊,2003(06):407-412.
[18]	M. Hrovat;J. Holc;S. Drnovsek;D. Belavic;J. Bernard;M. Kosec;L. Golonka;A. Dziedzic;J. Kita .Characterization of PZT thick films fired on LTCC substrates[J].Journal of Materials Science Letters,2003(17):1193-1195.
[19]	Juuti J.;Lozinski A.;Leppavuori S. .LTCC compatible PLZT thick-films for piezoelectric devices[J].Sensors and Actuators, A. Physical,2004(1/3):361-364.
[20]	Yan T;Jones BE;Rakowski RT;Tudor MJ;Beeby SP;White NM .Design and fabrication of thick-film PZT-metallic triple beam resonators[J].Sensors and Actuators, A. Physical,2004(2/3):401-407.
[21]	Tanaka K.;Kubota T.;Sakabe Y. .Preparation of piezoelectric Pb(Zr,Ti)O-3-Pb(Zn1/3Nb2/3)O-3 thick films on ZrO2 substrates using low-temperature firing[J].Sensors and Actuators, A. Physical,2002(2/3):179-183.
[22]	毕荣;杨琨超.集成电路与混合微电路用附属材料及其加工工艺[A].,2003:895-896.
[23]	Holc J;Hrovat M;Kosec M .Interactions between alumina and PLZK thick films[J].Materials Research Bulletin,1999,34(14-15):2271-2278.
[24]	Yongbae Jeon;Jaeshik Chung;Kwangsoo No .Fabrication of PZT thick films on silicon substrates for piezoelectric actuator[J].Journal of electroceramics,2000(1):195-199.
[25]	Tsurumi T;Ozawa S;Wada S .Preparation of PZT thick film by an interfacial polymerization method[J].Journal of Sol-Gel Science and Technology,2003,26:1037-1040.
[26]	Simon L;Ledren S;Gonnand P et al.Processing and characterization of PbTiO3 thick films on alumina substrates[J].Journal of Electroceramics,2002,8:215-219.

上一张下一张

计量

下载量()
访问量()

作者相关

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网

PZT压电厚膜的研究现状与进展

Status and Progress for Investigation of PZT Piezoelectric Thick Film

参考文献