溶胶-凝胶法制备二氧化锡薄膜

硅酸盐通报 , 2001, 20(1): 6-9. doi: 10.3969/j.issn.1001-1625.2001.01.002

溶胶-凝胶法制备二氧化锡薄膜

潘庆谊 ^1, , 张剑平 ^2, , 董晓雯 ^3, , 程知萱 ^4, , 施利毅 ^5,

1.上海大学理学院化学系，上海 200072

2.上海大学理学院化学系，上海 200072

3.上海大学理学院化学系，上海 200072

4.上海大学理学院化学系，上海 200072

5.上海大学理学院化学系，上海 200072

关键词：溶胶凝胶法 , 二氧化锡 , 薄膜 , 厚度

Preparation of SnO2 Thin Films by Sol-Gel Method

以无机物(SnCl4.5H2O）为前驱物采用溶胶-凝胶技术、浸渍涂布法制备二氧化锡薄膜。研究了凝胶的脱水与晶化过程，得到经600℃热处理后凝胶晶化完整。同时对不同粘度的涂布液与成膜厚度以及不同提拉速度与成膜厚度的关系进行研究，得到较好的直线关系。膜厚与提拉速度的关系式为t≈V0.58。

The SnO2 thin films were prepared by Sol-Gel technique anddip-coating method using colloidal particles derived from an inorganic salt（SnCl4.5H2O）as precursor.Well-crystallized SnO2 thin films were obtained about 600℃ after dehydration.When the content of SnO2 and the pulling rate are fixed there is a well linear relationship between the thickness of SnO2 thin films and the different viscosities of the dipping solutions.And when the content of SnO2 and PVA used as viscosity adjustment agent are fixed there is also a well linear relationship between the thickness of SnO2 thin films and the pulling rates.The mean slope of the straight lines is 0.58，which is well in line with the reported scale.The thickness（t）of SnO2 thin films and the pulling rates（v）of substrates from dipping solutions were correlated with an expression of t≈V0.58.

参考文献

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[5]	C C Yang;J Y Josefowicz;L Alexandru .[J].THIN SOLID FILMS,1980,74:117-127.

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