压电薄膜在微传感器和微致动器方面的应用日益受到重视.薄膜压电性能的测量方法与体材相比有很大不同.本文介绍了几种测量薄膜压电特性的方法,包括:激光干涉仪法,扫描探针显微镜法,垂直加载法等,并比较了这些方法的优缺点.对已有的测量结果进行了简要分析.
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