采用非平衡磁控溅射与等离子源离子注入(PSII)的混合技术,在1Cr18Ni9Ti不锈钢上制备N/Ti,N/TiN/C/DLC多层膜,研究其结构和微动磨损性能,并与N注入层比较.结果表明,N注入层内形成了CrN和Fe3N等氮化物相;多层膜内形成了TiN,Ti2N和CrN等化合物相.PSII技术能够提高1Cr18Ni9Ti不锈钢的表面硬度,N注入层的硬度约为基体硬度的2.5倍,DLC多层膜的硬度约为基体硬度的4倍.N注入层和DLC多层膜都能够提高 1Cr18Ni9Ti的抗微动磨损性,虽然DLC多层膜比N注入层薄,但其抗微动磨损性能更好.
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