生长高面密度和尺寸均匀的量子点是半导体量子点实用化的关键.本文在已有研究工作的基础上,从材料本身的特性和生长量子点时的外界条件两方面总结了影响量子点生长的各种因素,从原理上分析了控制量子点有序生长的可能性的几种方法.
参考文献
[1] | H. Takamiya;M. Miura;N. Usami;T. Hattori;Y. Shiraki .Drastic modification of the growth mode of Ge quantum dots on Si by using boron adlayer[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):84-87. |
[2] | Shchukin VA.;Bimberg D. .Strain-driven self-organization of nanostructures on semiconductor surfaces[J].Applied physics, A. Materials science & processing,1998(6):687-700. |
[3] | 李昱峰,韩培德,陈振,黎大兵,王占国.表面应力诱导InGaN量子点的生长及其性质[J].半导体学报,2003(01):39-43. |
[4] | Zhao XW.;Aoyagi Y.;Sugano T.;Komuro S.;Isshiki H. .Formation and device application of Er-doped nanocrystalline Si using laser ablation[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2000(1/3):197-201. |
[5] | 王本忠,赵方海,彭宇恒,刘式墉.用GaAs张应变层控制InP衬底上InAs三维岛的有序排列[J].半导体学报,1998(03):226. |
[6] | 殷景志,王新强,李献杰,杜国同,张树人.张应变GaAs层引入使InAs/InP量子点有序化排列的机理研究[J].功能材料与器件学报,2000(04):321-324. |
[7] | S. Miyazaki;Y. Hamamoto;E. Yoshida;M. Ikeda;M. Hirose .Control of self-assembling formation of nanometer silicon dots by low pressure chemical vapor deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):55-59. |
[8] | 荻野俊郎;本间芳和 .半导体表面的原子结构设计(日文)[J].日本物理学会志(日本),2001,56:83290. |
[9] | 邓宁,黄文韬,王燕,罗广礼,陈培毅,李志坚.硼预淀积对自组织生长Ge量子点尺寸分布的影响[J].微纳电子技术,2002(06):16-20. |
[10] | G. Jin;J. L. Liu;K. L. Wang .Regimented placement of self-assembled Ge dots on selectively grown Si mesas[J].Applied physics letters,2000(24):3591-3593. |
[11] | Verscan L;Stoica T .Luminescence of Laterally Ordered Ge Islands along〈100〉Direction[J].Journal of Applied Physics,2002,91(12):10119-10120. |
[12] | 胡冬枝,赵登涛,蒋伟荣,施斌,顾骁骁,张翔九,蒋最敏.Si(001)斜切衬底上Ge量子点的固相外延生长[J].半导体学报,2002(06):604-608. |
[13] | 张永平,闫隆,解思深,庞世谨,高鸿钧.Si(111)-(7×7)表面上Ge量子点的自组织生长[J].物理学报,2002(02):296-299. |
[14] | 胡冬枝,杨建树,蔡群,张翔九,胡际璜,蒋最敏.退火过程中自组织生长Ge量子点的变化[J].半导体学报,2002(06):561-564. |
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