Fe-Ti-N薄膜在高溅射功率900W下用RF磁控溅射方法制备,膜厚为630～780nm.当氮含量在Fe-Ti(3.9at.%)-N(8.8at.%) 和 Fe-Ti(3.3at.%)-N(13.5at.%)范围内,薄膜由α′和Ti2N沉淀组成,4πMs超过纯铁,最高可达2.38T;而 Hc下降为89A/m,可以满足针对10Gb/in2高存储密度的GMR/感应式复合读写磁头中写入磁头的需要.
参考文献
| [1] | 新庄辉也.20世纪における磁性材料研究の历史と将来展望[J].应用物理,2000(69):934. |
| [2] | Jack K H.The Iron-nitrogen System:The Preparation and the Crystal Structures of Nitrogen-austenite (γ) and Nitrogen-martensite(α′)[J].Proceedings of the Royal Society A,1951(208):200. |
| [3] | Jack K H.The Occurrence and the Crystal Structure of α″-iron Nitride; A New Type of Interstitial Alloy Formed during the Tempering of Nitrogen- martensite[J].Proceedings of the Royal Society Series A,1951(208):216. |
| [4] | Kim T K;Takahashi M.New Magnetic Material Having Ultrahigh Magnetic Moment[J].Applied Physics Letters,1972(20):492. |
| [5] | Komuro M;Kozono Y;Hanazono M;Sugita.Epitaxial Growth and Magnetic Properties of Fe16N2 Films with High Saturation Magnetic Flux Density[J].Journal of Applied Physics,1990(67):5126. |
| [6] | Sugita Y;Takahashi H;Komuro M;Mitsuoka K,Sakuma A.Magnetic and Mssbauer Studies of Single-crystal Fe16N2 and Fe-N Martensite Films Epitaxially Grown by Molecular Beam Epitaxy[J].Journal of Applied Physics,1994(76):6637. |
| [7] | Sugita Y;Takahashi H;Komuro M;Igarashi M,Imura R,Kambe T.Magnetic and Electrical Properties of Single-phase,Single-crystal Fe16N2 Films Epitaxially Grown by Molecular Beam Epitaxy.Appl[J].Phys,1996(79):5576. |
| [8] | Cadogan J M.Are There Giant Magnetic Moments in Fe-nitrides?[J].Australian Journal of Physiology,1997(50):1093. |
| [9] | Metzger R M;Bao X H;Carbucicchio M.Magnetism of α″-Fe16N2[J].Journal of Applied Physics,1994(76):6626. |
| [10] | Coey J M D.The Magnetization of Bulk α″-Fe16N2[J].Journal of Applied Physics,1994(76):6632. |
| [11] | Ishida S;Kitawatase K .Electronic Structure and Magnetic Properties of Iron Nitrides[J].Journal of Magnetism and Magnetic Materials,1992,104-107:1933. |
| [12] | Ishida S;Kitawatase K;Fujii S;Asano S .Electronic Structure and Magnetic Properties of Fe16X2 (X=B,C and N)[J].Journal of Physics:Condensed Matter,1992,4(04):765. |
| [13] | Nakajima K;Okamoto S.Large Magnetization Induced in Single Crystalline Iron Films by High-dose Nitrogen Implantation[J].Applied Physics Letters,1990(56):92. |
| [14] | Morisako A;Matsumoto M;Maoe M.Magnetic Anisotropy and Soft Magnetism of Iron Nitride Thin Films Prepared by Facing-target Sputtering[J].Journal of Applied Physics,1991(69):5619. |
| [15] | Jiang H.;Tao K.;Li HD.;Wu QL. .STRUCTURE AND MAGNETIC PROPERTIES OF FE-N FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION[J].Journal of Applied Physics,1995(5):3299-3302. |
| [16] | Yoshitake T.;Ohkoshi M. .Structural characterization of Fe-N films prepared by laser ablation[J].IEEE Transactions on Magnetics,1995(6):3850-3852. |
| [17] | Zhou J P;Li D;Gu Y S;Chang X R,Zhao C S,Li F S,Qiao L J,Tian Z Z,Fang G D,Song Q S.The Structure and Soft Magnetic Properties of Fe-N Thin Films[J].IEEE Transactions on Magnetics,2001(37):3844. |
| [18] | Zhou JP.;Li D.;Gu YS.;Chang XR.;Zhao CS.;Li FS.;Qiao LJ.;Tian ZZ. Fang GD.;Song QS. .Ambiguities on structure analysis of Fe-N thin films[J].Journal of Magnetism and Magnetic Materials,2002(1):L1-L5. |
| [19] | Peng D L;Sumiyama K;Suzuki K.Effect of Heat Treatment on the Structure and Fe-Ti-N Alloy Films[J].Journal of Alloys and Compounds,1997(255):50. |
| [20] | Narayan P.B.;Kim Y.K. .Stress, microstructure and materials reliability of sputter-deposited Fe-N films[J].IEEE Transactions on Magnetics,1994(6):3921-3923. |
| [21] | Hamrin K;Johansson G;Fahlman A;Nordling C.Charge Transfer in Transition Metal Carbides and Related Compounds Studied by ESCA[J].Journal of Physics and Chemistry of Solids,1969(30):1835. |
| [22] | Herzer G. .Grain size dependence of coercivity and permeability in nanocrystalline ferromagnets[J].IEEE Transactions on Magnetics,1990(5):1397-1402. |
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