硅类薄膜材料是微机电系统使用的主要结构材料，它的力学特性直接关系到微机电系统的可靠性和使用寿命，而残余应力是微型机械设计的一个十分重要的力学特性。概述了国内外微型机械薄膜材料残余应力的测量原理、方法和特点，可供微机电系统的设计和制造者参考。
Thin film materials are the main materials used in MEMS(Microelectromechanical Systems). The mechanical properteis of thin film materails determine the performance and reliability of micromachined devices, and residual stress is one of the design preperties of MEMS. This paper outlines principles, methods and features of various techniques for measuring reisdual stress.
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