提出了一种新的结构来表征钛酸锶钡薄膜在微波频率下的介电特性,即在沉积有钛酸锶钡薄膜的氧化镁基片上制作了共面带阻滤波器.借助于共面带阻滤波器的谐振频率和Q值,通过比较其测量值与仿真值,可以得出钛酸锶钡薄膜的介电常数和介电损耗.在变温测试过程中,注意到金导电层的电导率对带阻滤波器的谐振频率和Q值有较大的影响.为了准确地得到钛酸锶钡薄膜的介电特性,仔细分析了金导电层对带阻滤波器频率响应曲线的影响,并在比较求值过程中消除了这一影响.
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