本文研究了不稳定液体基底上溅射金属薄膜的非平衡生长现象.实验发现:此类薄膜的生长速率不再是常数,与基底温度、表面覆盖率密切相关;薄膜的表面形貌受到了基底温度、溅射功率、固体-液体界面性质等因素的复杂影响.分析表明:生长界面的表面张力及其各向异性对薄膜生长过程起着重要的作用.
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