ZrVFe吸气剂激活过程研究

稀有金属, 2007, 31(4): 501-505. doi: 10.3969/j.issn.0258-7076.2007.04.020

ZrVFe吸气剂激活过程研究

顾为 ^1, , 熊玉华 ^2, , 杜军 ^3, , 毛昌辉 ^4, , 尉秀英 ^5, , 秦光荣 ^6,

1.北京有色金属研究总院先进电子材料研究所,北京,100088

2.北京有色金属研究总院先进电子材料研究所,北京,100088

3.北京有色金属研究总院先进电子材料研究所,北京,100088

4.北京有色金属研究总院先进电子材料研究所,北京,100088

5.北京有色金属研究总院先进电子材料研究所,北京,100088

6.北京有色金属研究总院先进电子材料研究所,北京,100088

关键词：锆钒铁 , 非蒸散型吸气剂 , 激活过程 , X射线光电子能谱

Investigation of Activation Process on ZrVFe Getter

通过X射线光电子能谱仪(XPS)对ZrVFe吸气剂的激活过程进行了研究.结果表明:暴露于大气的吸气剂表面覆盖着一层CO2, O2及碳氢化合物,合金表面中的锆和钒主要以氧化态存在.当吸气剂置于高真空进行激活时,钒的氧化物在较低的温度(200～300 ℃)下被还原,并且还原比例高于锆的氧化物.在激活温度为300 ℃至340 ℃的过程中,表面大量的ZrO2和VO2逐渐减少而被还原为亚氧化物和金属态.激活过程还导致了在表面近金属态锆的富集,以及部分金属碳化物的生成.

参考文献

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材料期刊网

ZrVFe吸气剂激活过程研究

Investigation of Activation Process on ZrVFe Getter

参考文献