利用磁控溅射的方法, 在热玻璃基片上制备了[Fe/Pt]n多层膜, 经不同温度真空热处理后, 得到L10有序结构的FePt薄膜(L10-FePt).实验结果表明: [Fe/Pt]n多层膜结构可使FePt薄膜的有序化温度由500 ℃降到350 ℃, 350 ℃退火20 min后其平行膜面矫顽力可达到421.8 kA·m-1.同时以Ag, Ti, Cu和Pt做底层, 利用[Fe/Pt]n多层膜结构制备了FePt薄膜, 磁性和X射线衍射结果表明: 与[Fe/Pt]n多层膜相比, 四种底层均没有进一步降低FePt薄膜的有序化温度, 其中Ag做底层对[Fe/Pt]n多层膜退火后的平行膜面矫顽力影响较小, 但能够提高其垂直磁各向异性;其他底层均会降低[Fe/Pt]n多层膜在高温退火时的平行膜面矫顽力, 且对其垂直磁各向异性无改善作用.
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