用磁控溅射法在(001)取向的LaAlO3单晶基片上制备了La0.67Sr0.33MnO3/La0.75MnO3/La0.67Sr0.33MnO3外延三层膜.结果表明, 与La0.67Sr0.33MnO3单层膜相比较, 外延三层膜的X射线衍射图上出现3级衍射峰, 每级衍射峰由3个峰组成:其中强度最高的衍射峰代表衬底的衍射;次强的代表上下两层La0.67Sr0.33MnO3膜;最弱的代表中间La0.75MnO3层.三层膜的二维原子力表面形貌为均匀的小颗粒状, 表明其三维形貌为外延岛状柱状晶.这种三层膜的巨磁电阻效应与中间层La0.75MnO3的厚度有关, 当中间层厚度为70 nm时, 其最大磁电阻值可达到32%, 这个结果优于La0.67Sr0.33MnO3 单层膜的巨磁电阻效应.其可能的原因是电子在界面上的散射、层间的交互作用, 以及点阵错配导致的内应力的综合结果.
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