采用溶液聚合法合成了水溶性丙烯酸树脂(WBAC),将其与季戊四醇三丙烯酸酯(PETA)、紫外光引发剂调配制备了水性丙烯酸光致抗蚀干膜.傅里叶红外光谱分析表明,PETA和WBAC发生了光固化交联反应;光致抗蚀干膜感光层涂膜性能测试表明,经UV固化后涂膜的凝胶率和硬度能显著提高,改善涂膜的耐溶剂性,降低了涂膜的水溶性;GPC和TG分析表明,经UV固化后,光致抗蚀干膜相对分子质量明显变大,耐热性能显著提高.PETA和WBAC的质量比0.4时,UV固化后光致抗蚀干膜的水溶性5.54%,乙醇失质量率WY为5.56%,凝胶率和摆杆硬度分别为74.18%和0.71,涂膜失质量5%的温度为302.6 ℃.
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