在316L不锈钢上采用金属有机化学气相沉积(MOCVD)法沉积了氧化铝涂层.使用XRD、SEM分析氧化铝涂层的物相和微观形貌,采用气相氢渗透装置对涂层氢渗透行为进行表征.结果表明,973 K退火处理后涂层为非晶氧化铝,涂层均匀、完整,厚度为190 nm.氧化铝涂层的氢渗透压力指数为0.56～0.78,说明氢渗透过程机制为表面过程和体扩散过程共同控制.氧化铝涂层的表观氢渗透率为P=1.99×10-6 exp(-117×103/RT)mol/(m.s.Pa1/2).氧化铝涂层的氢渗透激活能为117 kJ/mol,远高于316L不锈钢的66.6 kJ/mol,涂层对氢的渗透具有明显的阻挡作用.此外,在873～973 K氧化铝涂层对316L不锈钢的氢渗透阻挡因子(PRF)为59～119,涂层氢渗透阻挡性能优异.
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