用电子束蒸发技术在K9玻璃及两种不同取向的钇铝石榴石(Y3Al5O12,简称YAG)晶体上沉积了SiO2薄膜,采用X射线衍射仪和纳米划痕仪对薄膜显微结构和力学性能进行了研究.实验结果表明:薄膜在K9、YAG(100)和YAG(111)基底上分别呈现非晶态和多晶态；沉积在不同基底上的薄膜的弹性模量并无明显差异；SiO2薄膜在K9和YAG基底上呈现不同的划痕破坏模式,并且YAG晶体上薄膜的粘附失效临界附着力远远小于SiO2薄膜与K9基底的附着力.本文从薄膜的结构和弹性模量两方面分析解释了不同基底上薄膜的力学行为.
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