采用多靶磁控溅射技术,制备了TiN、VCN单层膜及调制比为1∶1的系列调制周期的TiN/VCN多层膜.利用X射线衍射仪、纳米压痕仪、高温摩擦磨损测试仪和扫描电子显微镜研究了各种薄膜的微结构、力学性能及室温和高温摩擦磨损性能.研究表明:TiN/VCN多层膜以δ-NaCl面心立方结构为主；TiN/VCN多层膜的最大硬度值为28.71 GPa,约为按混合法则计算所得理论硬度值的1.23倍,并据此分析了TiN/VCN多层膜的致硬机理；TiN/VCN多层膜在室温下摩擦系数与TiN单层膜摩擦系数相近,但当环境温度为700℃时,摩擦系数约0.4,较TiN单层膜(0.52)低.TiN/VCN多层膜室温和高温下的磨损率相比TiN单层膜减小了约3×10-14 m3/(N·m).从晶体化学和热测量方法角度讨论了TiN/VCN多层膜的Magné1i相V2O5的润滑机制.
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