基于射频磁控溅射法在柔性聚酯薄膜(PET)基片上制备FeCoB-SiO2薄膜.研究发现在PET基片上沉积的FeCoB-SiO2薄膜呈非晶态,其电阻率高达1755.73 μΩ·cm,饱和磁化强度为0.7T.由于非磁性相对畴壁位移的阻力作用,使得FeCoB-SiO2非晶膜的矫顽力远大于一般磁性金属非晶薄膜,其矫顽力达13130.205 A/m.使用同轴传输法的微波参数测量结果表明在3_8和5.0GHz处出现了双共振峰,使得在500MHz～12GHz范围内μ′>2.5,μ″在3.6～8.0GHz.其值超过6,在较宽的频带范围内有着良好的微波电磁特性.
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