用交替射频磁控溅射法在石英基片上沉积并退火制备了ZrW2O8薄膜,测量了薄膜与基片之间的结合力和薄膜厚度,研究了薄膜的负热膨胀特性.结果表明:用磁控溅射方法制备的薄膜为非晶态,表面平滑、呈颗粒状,在1200℃热处理3 min后得到立方相ZrW2O8薄膜,结晶薄膜的颗粒长大,薄膜与基片之间有良好的结合力.立方相ZrW2O8薄膜在15-200℃热膨胀系数为-24.81×10-6K-1,200-700℃热膨胀系数为-4.78×10-6K-1,平均热膨胀系数为-10.08×10-6K-1.
参考文献
[1] | T.A.Mary,J.S.O.Evans,T.Vogt,Negative thermal expansion from 0.3 to 1050 Kelvin in ZrW2O8,Science,272,90(1996) |
[2] | J.S.O.Evans,T.A.Mary,T.Vogt,Negative thermal expansion in Zr and HfW2O8,Chem.Mater.,8,2809(1996) |
[3] | J.S.O.Evans,T.A.Mary,A.W.Sleight.Negative thermal expansion in large molybdate and tungstate,J.Solid State Chem.,133,580(1997) |
[4] | CHENG Xiaonong,SUN Xiujuan,YANG Juan,XU Guifang,Synthesis of negative thermal expansion mate rial ZrW2O8 powders using solid state reaction,Journal of Jiangsu University(Natural Science Edition),26(4),350(2005)(程晓农,孙秀娟,杨娟,徐桂芳,固相法合成负热膨胀性粉体ZrW2O8,江苏大学学报(自然科学版),26(4),350(2005)) |
[5] | CHENG Xiaonong,ZHANG Meifen,YAN Xuehua,Research on mechanism and preparation of negative thermal expanmon compound material ZrW2O8,Journal of Jiangsu University(Natural Science Edition),25(3),243(2004)(程晓农,张美芬,严学华,负热膨胀化合物材料ZrW2O8的机理与制备技术,江苏大学学报(自然科学版),25(3),243(2004)) |
[6] | L.D.Noailles,H.-h.Peng,J.Starkovich,B.Dunn,Thermal expansion and phase formation of ZrW2O8 aerogels,Chem.Mater.,16,1252(2004) |
[7] | YAN Xuehua,YANG Xinbo,CHENG Xiaonong,High pure negative thermal expansion material ZrW2O8 powders synthesized by combustion method,J.Chinese Ceram.Soc.,34(9),1066(2006)(严学华,杨新波,程晓农,燃烧法合成高纯度负热膨胀材料ZrW2O8粉体,硅酸盐学报,34(9),1066(2006)) |
[8] | SUN Xiujuan,YANG Juan,LIU Qinqin,CHENG Xiaonong,Effect of preparation method on particle size and negative thermal expansion property of negative thermal expansion ZrW2O8 powders,J.Chinese Inorg.Chem..22(9),1635(2006)(孙秀娟,杨娟,刘芹芹,程晓农,制备方法对负热膨胀ZrW2O8粉体的颗粒大小以及负热膨胀性能影响的研究,无机化学学报,22(9),1635(2006)) |
[9] | YANG Xinbo,CHENG Xiaonong,YAN Xuehua,Synthesis of ZrO2/ZrW2O8 composites with low thermal expansion,Compos.Sci.&Technol.,6v(6),1167(2007) |
[10] | P.Lommens,C.De Meyer,E.Bruneel,Synthesis and thermal expansion of ZrO2-ZrW2O8 composites,Euro.Ceram.Soc.,25,3605(2005) |
[11] | Eiki NIKA,Shuhji WAKAMIKO,Takaaki ICHIKAWA.Preparation of dense ZrO2-ZrW2O8 cosintered ceramics with controlled thermal expansion coefficients,Ceram.Soc.Japan,112(5),271(2004) |
[12] | M.S.Sutton,J.Talghader,Micromachine negative thermal expansion thin films,The 12th International Conference Solid State Sensors,Actuators and Microsystems,Boston,America,2,1148(2003) |
[13] | M.S.Sutton,J.Talghader,Zirconium tungstate(ZrW2O8)-based mieromachined negative thermal-expansion thin films,J.Microelectromech.Syst.,13(4),688(2004) |
[14] | XIAO Zhaojuan,YAN Xuehua,CHENG Xiaonong,Fabrication of ZrW2O8 thin films by radio frequency magnetronsputtering,J.Chinese Ceram.Soc.,34(3),314(2006)(肖兆婿,严学华,程晓农,磁控溅射法制备钨酸锆薄膜,硅酸盐学报,34(3),314(2006)) |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%