使用超高真空离子束辅助沉积系统(IBAD)制备一系列具有纳米调制周期的ZrN/TiAlN多层膜,研究了离子辅助轰击对薄膜性能的影响.结果表明:离子辅助轰击使大部分ZrN/TiAlN多层膜的纳米硬度和弹性模量值高于两种个体材料硬度的平均值;离子的轰击和薄膜表面原子与轰击离子之间的动量传输提高了薄膜的致密度;当轰击能量为200 eV时,多层膜的硬度最高(30.6 GPa),弹性模量、表面粗糙度和摩擦系数等也明显改善.
参考文献
| [1] | K.J.Martin,A.Madan,D.Hoffman,J.Ji,S.A.Barnett,Mechanical properties and thermal stability of TiN/TiB2 nanolayered thin films,J.Vac.Sci.Technol.A,23,90(2005) |
| [2] | D.J.Li,M.X.Wang,J.J.Zhang,Structural and mechanical responses of (Zr,Al)N/ZrB2 superlattice coatings to elevated-temperature annealing,Mater.Sci.Eng.A,423,116(2006) |
| [3] | D.J.Li,F.Liu,M.X.Wang,J.J.Zhang,Q.X.Liu,Structural and mechanical properties of multilayered gradient CrN/ZrN coatings,Thin Solid Film,506-507,202(2006) |
| [4] | D.J.Li,M.X.Wang,J.J.Zhang,J.Yang,Working pressure induced structural and mechanical properties of nanoscale ZrN/W2N multilayered coatings,J.Vac.Sc.Technol.A,24,966(2006) |
| [5] | K.W.Lee,Y.H.Chen,Y.W.Chung,L.M.Keer,Hardness,internal stress and thermal stability of TiB2/TiC multilayer coatings synthesized by magnetron sputtering with and without substrate rotation,Surf.Coat.Technol,177-178,591(2004) |
| [6] | C.H.Hsu,M.Li.Chen,K.L.Lai,Corrosion resistance of TiN/TiAlN-coated ADI by cathodic arc deposition,Mater.Sci.Eng.A,421,182(2006) |
| [7] | Q.Luo,P.Eh.Hovsepian,Transmission electron microscopy and energy dispersive X-ray spectroscopy on the worn surface of nano-structured TiAlN/VN multilayer coating,Thin Solid Films,497,203(2006) |
| [8] | HU Xiaoping,Li Geyang,Gu Mingyuan,Influence of the growth of c-AlN on the mechanical properties of AlN/(Ti,Al)N nanomultilayers,Chinese Journal of Materials Research,17(3),326(2003).(胡晓萍,李戈扬,顾明元,c-AlN的生长对AlN/(Ti,Al)N纳米多层膜力学性能的影响,材料研究学报,17(3),326(2003)) |
| [9] | WEI Lun,SHAO Nan,MEI Fanghua,Li Geyang,The effects of crystallization of SiO2 layers on the growth structure and mechanical properties of TiN/SiO2 nanomultilayers,Chinese Journal of Materials Research,19(5),478(2005).(魏仑,邵楠,梅芳华,李戈扬,SiO2层晶化对TiN/SiO2纳米多层膜结构和性能的影响,材料研究学报,19(5),478(2005)) |
| [10] | Y.Y.Chang,D.Y.Wang,C.Y.Hung,Structural and mechanical properties of nanolayered TiAlN/CrN coatings synthesized by a cathodic arc deposition process,Surf.Coat.Technol.,200,1702(2005) |
| [11] | J.V.Ramana,S.Kumar,C.David,A.K.Ray,V.S.Raju,Characterisation of zirconium nitride coatings prepared by DC magnetron sputtering,Mater.Lett,43,73(2000) |
| [12] | C.P.Liu,H.G.Yang,Deposition temperature and thickness effects on the characteristics of dc-sputtered ZrNx films,Mater.Chem.Phys.,86,370 (2004) |
| [13] | A.Madan,I.W.Kim,S.C.Cheng,P.Yashar,V.P.Dravid,S.A.Barnett,Stabilization of cubic AlN in epitaxial AlN/TiN superlattice,Phys.Rev.Lett.,78,1743(1997) |
| [14] | H.Holleck,M.Lahres,P.Woll,Multilayer coatings influence of fabrication parameters on constitution and properties,Surf.Coat.Technol.,41,179(1990) |
| [15] | Y.Setsuhara,T.Suzuki,Y.Makino,Phase variation and properties of (Ti,Al)N films prepared by ion beam assisted deposition,Surf.Coat.Technol.,97,254(1997) |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%