研究了在热阴极辉光放电等离子体化学气相沉积金刚石膜过程中,热阴极辉光放电特性与金刚石膜沉积工艺的关系.结果表明,适当的阴极温度是保证大电流、高气压辉光放电的必要条件.阴极的温度影响辉光放电阴极位降区的放电性质.金刚石膜的沉积速率随着气体压力(16～20 kPa)的升高而上升,在18.6 kPa左右出现最高值,而阳极位降区电场强度的降低使膜品质下降.放电电流(8～12 A)对沉积速率的影响与气体压力的影响具有相似的规律.
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