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采用两种不同沉积速度的等温减压化学气相沉积在3D C/SiC上制备了多层CVDSiC涂层.利用扫描电镜对涂层表面和断面进行显微分析,考察了涂层在1300℃下进行恒温氧化的防护效果.慢速减压化学气相沉积能够对多层CVD SiC涂层的涂层间隙缺陷实现有效控制,所制备的多层涂层可以消除涂层间隙,连贯的结合为一整体,能显著提高涂层防护效果,材料在1300℃空气中氧化30h后的失重率可控制在1%以下.

参考文献

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