介绍了一种新的脉冲激光真空弧沉积技术,利用该技术在硅基片上制备了类金刚石薄膜.利用激光拉曼分析技术对沉积膜进行了结构分析,结果表明沉积膜为非晶结构,具有明显的sp3结构特征.同时利用纳米划痕压痕仪、原子力显微镜等分析设备对膜的表面形貌、微观摩擦学性能进行了分析,结果表明Si〈100〉基片上沉积膜的表面形貌和微观摩擦学性能略优于Si〈111〉基片上沉积的薄膜,其摩擦系数平均值为0.036.
参考文献
| [1] | 戴达煌,周克崧.金刚石薄膜沉积制备工艺与应用,第一版.北京:冶金工业出版社,2000.154-155. |
| [2] | 周明,邵天敏,马洪涛,等.润滑与密封,2002,(2):41-43. |
| [3] | Scheibe H J, Schultrich B. Thin Solid Films, 1994, 246: 92-102. |
| [4] | Scheibe H J, Schultrich B, Drescher D. Surface and Coatings Technology, 1995, 74-75: 813-818. |
| [5] | Scheibe H J, Drescher D, Schultrich B, et al. Surface and Coatings Technology, 1996, 85: 209-214. |
| [6] | Ziegele H, Scheibe H J, Schultrich B. Surface and Coatings Technology, 1997, 97: 385-390. |
| [7] | 周明.脉冲激光真空弧沉积设备研制及金属薄膜制备.北京:清华大学硕士学位论文,2001. |
| [8] | Staryga, Elzbieta Chaos. Solitonsand Fractals, 1999, 10: 2075-2086. |
| [9] | Sharma, Narayan A K, Narayan R J, et al. Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2000, 77: 139-143. |
| [10] | Ogwu A A, Lamberton R W, Morley, et al. Physica B: Condensed Matter., 1999, 269: 335-344. |
| [11] | 陈弟虎,等(Chen Di-Hu,et al).无机材料学报(Journal of Inorganic Materials),2000,15(1):179-182. |
| [12] | Coll B F, Sathrum P, Aharonov R, et al. Thin Solid Films, 1992, 209: 165-173. |
| [13] | Huang Li-Ye, Xu Ke-Wei, Lu Jian, et al. Surface and Coatings Technology, 2002, 154(2-3): 232-236. |
| [14] | 黄立业(Huang Li-Ye).无机材料学报(Journal of Inorganic Materials),2001,16(5):1004-1008. |
| [15] | Voevodin A A, Donley M S. Surface and Coatings Technology, 1996, 82(3): 199-213. |
| [16] | Voevodin A A, Donley M S, Zabinski J S. Surface and Coatings Technology, 1997, 92(1-2): 42-49. |
| [17] | Lucia V Santos, Vladimir J Trava-Airoldi, Evaldo J Corat, et al. Diamond and Related Materials, 2002,11(3-6): 1135-1138. |
| [18] | Wei Q, Sharma A K, Sankar J, et al. Composites Part B: Engineering, 1999, 30(7): 675-684. |
| [19] | 张泰华,刘东旭,郇勇,等.中国航空学报.2003,16(1):47-51. |
| [20] | Staedler T, Schiffmann K. Surface Science, 2001, 482-485: 1125-1129. |
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