采用电弧离子镀方法,在Si(100)基底上沉积了类金刚石(DLC)膜.用激光Raman谱和X射线光电子能谱(XPS)对不同偏压下沉积的类金刚石膜的结构进行了分析.结果表明,Raman谱的D峰和G峰的强度之比ID/IG随着脉冲负偏压的增加先减小后增大,sp3键含量随着负偏压的增加先增加后减小.偏压为-200 V时,ID/IG值最小为0.70,sp3键含量最大为26.7%.纳米压痕仪测量结果表明,随着脉冲负偏压增加,硬度和弹性模量先增加后下降.偏压为-200 V时,DLC膜的硬度和弹性模量最大,分别为30.8和250.1 GPa.
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