对热丝化学气相沉积(HFCVD)生长金刚石膜过程中影响衬底温度场的热丝几何参数及其他相关沉积参数进行了模拟计算.结果表明,通过优化参数,用80 mm×80 mm的热丝阵列可以获得76 mm×76 mm面积的均匀衬底温度区,进一步利用辅助热丝则可将均温区面积扩大到100 mm×100 mm.这些结果可以为沉积高质量、大面积金刚石膜的工艺参数提供理论依据.
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