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目的 改善钛合金表面抗微动磨损性能.方法 利用非平衡磁控溅射技术在钛合金表面沉积MoS2-Ti/Cu-Ni-In多层固体润滑膜,并与MoS2-Ti与Cu-Ni-In单层固体润滑膜进行对比.利用扫描电镜、显微硬度计、摩擦磨损试验机、表面轮廓仪对固体润滑薄膜的形貌、硬度、抗微动磨损性能、磨痕形貌进行分析测试.结果 所制备的Cu-Ni-In单层膜与MoS2-Ti单层膜结构致密,与基体结合良好,MoS2-Ti/Cu-Ni-In多层膜交替结构清晰,结构致密.MoS2-Ti/Cu-Ni-In多层膜的硬度大于MoS2-Ti及Cu-Ni-In单层膜,多层膜的平均微动系数为0.06,MoS2-Ti单层膜的平均微动系数为0.102,Cu-Ni-In单层膜的平均微动系数大于1.0.在12000个微动循环周期后,测得MoS2-Ti/Cu-Ni-In多层膜的最终磨损总量为0.045 mm3,Cu-Ni-In单层膜的最终磨损总量为37.79 mm3,MoS2-Ti单层膜的最终磨损总量为0.296 mm3,即多层膜的抗微动磨损性能较Cu-Ni-In单层膜改善了2个数量级,较MoS2-Ti单层膜改善了5倍以上.结论 MoS2-Ti/Cu-Ni-In多层膜中的多个界面对单层晶粒生长起到了阻挡作用,从而致使交替结构中的单层晶粒得到细化,Cu-Ni-In膜的引入延缓了MoS2-Ti膜的剥落及其转移,增加了不锈钢球与多层膜间第三体的润滑及减磨效果,多层膜表现出了优异的抗微动磨损性能.

The work aims to improve the fretting wear resistance of titanium alloy surface. MoS2-Ti/Cu-Ni-In multilayer solid lubricating films were deposited on the surface of titanium alloy by non-balanced magnetron sputtering technique, and were compared with MoS2-Ti and Cu-Ni-In monolayer solid lubrication films. The morphology, hardness, fretting wear beha-vior and wear scar of solid lubrication films were analyzed by scanning electron microscope, micro hardness tester, friction wear tester and surface profile instrument. The prepared Cu-Ni-In and MoS2-Ti monolayer films structure was clear and had good adhesion to substrate. Alternating structure of MoS2-Ti/Cu-Ni-In multilayer films was clear and the structure was compact. The hardness of MoS2/Cu-Ni-In multilayer films was higher than that of MoS2-Ti and Cu-Ni-In monolayer films. Average fretting coefficient of MoS2-Ti/Cu-Ni-In multilayer films was 0.06, average fretting coefficient of MoS2-Ti monolayer films was 0.102 and average coefficient of Cu-Ni-In monolayer films was more than 1.0. After 12,000 fretting cycles, final wear amount of the MoS2-Ti/Cu-Ni-In multilayer films was 0.045 mm3, Cu-Ni-In monolayer films 37.79 mm3 and MoS2-Ti monolayer films 0.296 mm3. The fretting wear volume of multilayer films has improved by 2 orders of magnitude compared with that of Cu-Ni-In monolayer films, and by more than 5 times compared with that of MoS2-Ti monolayer films. Several interfaces in MoS2-Ti/Cu-Ni-In multilayer suppress growth of monolayer grain, thus refining monolayer grain in the alternating structure. The introduction of Cu-Ni-In films into the MoS2-Ti/Cu-Ni-In multilayer films delays peeling off and transfer of the MoS2-Ti films, and has enhanced the lubrication and anti-friction effect of the third body between stainless steel ball and the multilayer films. The multilayer films showed excellent fretting wear resistance.