目的 在室温条件下,采用物理气相沉积( PVD)磁控溅射沉积方法,通过控制Si靶功率制备具有不同Si含量的CrSiN涂层,以探究Si元素对涂层结构和性能的影响.方法 通过X射线衍射、能谱仪测试、纳米压痕测试、维氏硬度压痕测试和摩擦磨损实验,分别评价CrSiN涂层的结构、硬度、韧性和耐磨性能,并通过扫描电子显微镜对压痕形貌进行分析. 结果 所有CrSiN涂层均呈( 111 ) , ( 200 )取向的NaCl结构. 随着Si含量增加,XRD峰呈宽化趋势,晶粒细化效果明显. 随Si元素的加入,CrSiN涂层硬度、模量和韧性均呈先增加后降低的趋势. 相比CrN涂层,Si的原子数分数为3. 2%时,CrSiN涂层的硬度由21. 4 GPa增至35. 7 GPa,模量由337. 7 GPa增至383. 9 GPa,塑性指数由0. 5增至0. 55,实现了强韧一体化. 加入Si元素,CrSiN涂层的耐磨损性能得到改善,且Si的原子数分数为3. 2%,磨损率最低,为1. 0×10-17 m3/(N·m),提高了约一个数量级.结论 Si元素的加入可以有效改善CrSiN涂层的结构,提高CrSiN涂层的硬度、韧性和磨损性能,但需加入适量的Si,才可实现性能最优化.
Objective To prepare the CrSiN coatings with different Si contents through controlling Si target power using physical vapor deposition ( PVD) magnetron sputtering method at room temperature so as to explore the influence of Si content on structure and properties of coating. Methods The structure, hardness, toughness and wear resistance of CrSiN coating were respectively e-valuated by X-ray diffraction, energy dispersive spectroscopy testing, nanoindentation test, Vickers indentation and friction test. And the indentation morphology was analyzed further by scanning electron microscope. Results The results indicated that all coat-ings showed (111), (200) orientation of the NaCl structure. With increasing Si content, XRD peak turned wider and the grain re-finement effect was obvious. With adding Si element, the hardness, modulus and toughness increased firstly and then decreased. Compared to CrN coating, the hardness increased from 21. 4 GPa to 35. 7 GPa, modulus improved from 337. 7 GPa to 383. 9 GPa and plasticity index increased to 0. 55 from 0. 5, achieving an integration of hard and tough for CrSiN coating with Si content at 3. 2%. The wear resistance of CrSiN coating was improved by almost an order of magnitude and the wear rate was the lowest (1. 0 ×10-17 m3/(N·m)) when Si content was 3. 2%. Conclusion The structure can be obviously improved, and the hardness, tough-ness and wear resistance can be increased by adding silicon in CrSiN coating. However, the amount of Si element needs to be add-ed appropriately for performance optimization.
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