TiN具有硬度高、韧性好、摩擦系数小、化学性能稳定等优点，广泛应用于刀具、装饰、表面防护等领域。目前制备TiN涂层的方法有很多，如气相沉积、热喷涂、电镀等，反应等离子喷涂则是最常用的金属-陶瓷复合涂层制备方法。概述了反应等离子喷涂技术的基本原理和分类，包括反应等离子喷涂涂层的形成过程及工艺的优缺点。综述了反应等离子喷涂TiN涂层的喷涂工艺及性能的研究进展，包括涂层的制备方法(原位合成法、烧结破碎法)和性能特点，重点分析了涂层的力学性能、耐磨损性能、耐腐蚀性能，并提出了可以依靠热处理工艺或封孔技术来提高涂层的耐腐蚀性能。依据实验和查阅的文献，反应等离子喷涂结合了自蔓延高温合成技术和等离子喷涂技术，可以制备质量优良的厚 TiN 涂层(>500μm)，是一种新型的低成本涂层制备技术，但是反应等离子喷涂制备TiN涂层存在孔隙率较高(5%~10%)、结合强度较低(<50 MPa)的问题。分别从技术、设备、工艺、后处理四个方面总结了改善涂层质量的相应措施，展望了今后的研究发展方向。
ABSTRACT:TiN has excellent properties such as high hardness, good toughness, low friction coefficient, chemical stability, and has been used in cutting tools, decorations, surface protection. There are many methods to fabricate TiN coatings, such as vapor deposition, thermal spraying, electroplating, and reactive plasma spraying is a common way to prepare metal-ceramic composite coatings. The basic principles and types of reactive plasma spraying technology, including the process of coating, the advantages and the disadvantages, were reviewed, and the recent progresses of reactive plasma sprayed TiN coatings, including fabrication ( in-situ synthesis, sinter crushing) and properties were introduced. In addition, the mechanical properties, wear and corrosion re-sistance were analyzed. And the methods of heat treatment and sealing are suggested to improve the corrosion resistance of the coa-ting. According to the experiments and literatures, reactive plasma spraying is a novel technique with low production cost which combines the advantages of self-propagating high-temperature synthesis and plasma spraying. Thick TiN coatings ( over 500 μm) with high quality can be prepared via reactive plasma spraying. However, the reactive plasma sprayed TiN coatings also have prob-lems such as high porosity (5% to 10%) and low adhesion (<50 MPa). The measures to improve the quality of TiN coatings were summarized from the aspects of technology, facility, craft and post processing, and the trend of development was prospected.
参考文献
| [1] | 居毅,李宗全.多层复合TiN镀层的研究进展[J].浙江理工大学学报,2005(04):345-349. |
| [2] | 董艳春 .反应等离子喷涂纳米TiN涂层材料的研究[D].河北工业大学,2006. |
| [3] | 李明,周小平.反应喷涂制备Al2O3-TiB2复相涂层的工艺研究[J].表面技术,2011(05):61-63. |
| [4] | 马壮,曲文超,李智超.AZ91D热化学反应热喷涂陶瓷涂层热震性研究[J].表面技术,2008(02):52-53,78. |
| [5] | 赵扬,马志远,陈建伟,林莉,马健,赵鹏.热障涂层失效的无损检测与评价研究进展[J].河北科技大学学报,2013(06):494-500. |
| [6] | 崔海亭,张改,蒋静智.铝硅合金相变材料凝固/熔化过程的数值分析[J].河北科技大学学报,2012(05):453-458. |
| [7] | 简中华,马壮,曹素红,王富耻,王全胜.超音速火焰喷涂WC-Co与NiCr-Cr2C3涂层磨损性能研究[J].材料工程,2007(07):21-24. |
| [8] | GAHRKHZ;BUNDSCHUHW;ZIMMERLINB .Effectof Grain Size on Friction and Sliding Wear of Oxide Ceramics[J].WEAR,1993,162/163/164:269-279. |
| [9] | F. Borgioli;E. Galvanetto;F. P. Galliano;T. Bacci .Sliding wear resistance of reactive plasma sprayed Ti-TiN coatings[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2006(7/8):832-837. |
| [10] | Barshilia HC;Rajam KS .Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator[J].Surface & Coatings Technology,2006(3/4):1827-1835. |
| [11] | Labdi S;Jellad A;Maciejak O .Loading rate effect on lateral force measurements on nanostructured Ti and TiN thin films[J].Surface & Coatings Technology,2006(1/2):113-119. |
| [12] | 王成磊,高原,卜根涛,申罡.工艺参数对等离子合成TiN层相结构的影响[J].表面技术,2010(02):47-49,60. |
| [13] | Tahara H;Ando Y .Study of titanium nitride deposition by supersonic plasma spraying[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2008(1):98-101. |
| [14] | T. Bacci;L. Bertanmini;F. Ferrari;F. P. Galliano;E. Galvanetto .Reactive plasma spraying of titanium in nitrogen containing plasma gas[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,2000(1/2):189-195. |
| [15] | 周小平,王小军,朱理奎.反应等离子喷涂 Al2 O3-TiB2-Al 复相涂层的反应机理[J].表面技术,2014(4):6-10,16. |
| [16] | 孙方红,马壮,李福永,张洋,杨代玉.反应热喷涂制备陶瓷涂层的研究进展[J].材料保护,2013(04):48-50. |
| [17] | 解永杰,阎殿然,何继宁,李香芝,董艳春,冯文然.反应等离子喷涂陶瓷涂层的研究[J].新技术新工艺,2005(01):48-50. |
| [18] | 刘涵 .等离子喷涂金属-陶瓷复合涂层腐蚀机理研究[D].南京:河海大学,2013. |
| [19] | 司力琼,王泽华,周泽华,江少群,张晶晶.提高热喷涂层致密性技术的研究现状及发展方向[J].材料保护,2011(08):51-55. |
| [20] | 王赛虎 .等离子喷涂金属陶瓷涂层的性能研究[D].江苏科技大学,2011. |
| [21] | 张晶晶 .等离子喷涂 NiCrAl/Al2 O3-13wt.%TiO2 涂层体系结合及评价方式的研究[D].南京:河海大学,2013. |
| [22] | 闫华,王爱华,熊钊颋,黄早文.自蔓延反应喷涂技术最新研究及进展[J].材料导报,2009(13):91-94. |
| [23] | 成志芳,马壮,卢林.等离子喷涂Al2O3-13％TiO2涂层微观组织形貌分析[J].表面技术,2012(03):9-11. |
| [24] | 邹东利,阎殿然,何继宁.反应等离子喷涂TiN复相陶瓷涂层的研究[J].稀有金属材料与工程,2007(z3):225-229. |
| [25] | 王泽华,王长浩,周泽华,江少群.高温反应合成金属-陶瓷复合涂层技术的研究现状[J].表面技术,2012(03):115-119. |
| [26] | 于加洋.反应热喷涂技术的研究进展[J].黑龙江科技信息,2007(20):8. |
| [27] | 朱警雷,黄继华,王海涛,徐俊龙,赵兴科,张华.反应等离子喷涂TiC/Fe-Ni金属陶瓷复合涂层的显微组织[J].中国有色金属学报,2008(01):36-41. |
| [28] | 牛二武,阎殿然,何继宁,耿伟.反应等离子喷涂Fe-Al2O3-FeAl2O4复合涂层的反应机理研究[J].材料保护,2005(06):21-23. |
| [29] | YANG Yong;YAN Dian-ran;DONG Yan-chun et al.In situ Nanostructured Ceramic Matrix Composite Coating Prepared by Reactive Plasma Spraying Micro-sized Al-Fe2 O3 Compo-site Powders[J].Journal of Alloys and Compounds,2011,509:190-194. |
| [30] | O. Culha .Mechanical properties of in situ Al_2O_3 formed Al-Si composite coating via atmospheric plasma spraying[J].Materials & design,2010(1):533-544. |
| [31] | Tekmen, C;Tsunekawa, Y;Okumiya, M .In-situ TiB2-Al2O3 formed composite coatings by atmospheric plasma spraying: Influence of process parameters and in-flight particle characteristics[J].Surface & Coatings Technology,2009(12):1649-1655. |
| [32] | 姚羰红,王泽华,周泽华,江少群.反应等离子喷涂技术的研究进展[J].机械工程材料,2011(12):1-5. |
| [33] | 乔新义 .等离子喷涂内送粉喷枪的设计及工艺优化[D].北京:中国农业机械化科学研究院,2014. |
| [34] | 王吉孝,蒋士芹,庞凤祥.等离子喷涂技术现状及应用[J].机械制造文摘-焊接分册,2012(01):18-22. |
| [35] | 杨洪伟,栾伟玲,涂善东.等离子喷涂技术的新进展[J].表面技术,2005(06):7-10. |
| [36] | 徐峰,李文虎,艾桃桃,王同乐,付蕾.Q235钢表面氩弧熔覆TiC复合涂层的组织与性能[J].表面技术,2012(05):53-55. |
| [37] | 岳云龙,公衍生,沈强,张联盟.原位（In-stiu）反应合成技术在制备金属基复合材料中的应用[J].硅酸盐通报,2002(04):45-48,55. |
| [38] | 李奎,汤爱涛,潘复生.金属基复合材料原位反应合成技术现状与展望[J].重庆大学学报(自然科学版),2002(09):155-160. |
| [39] | 高才,许斌.激光熔覆陶瓷增强金属基复合涂层技术的研究进展[J].表面技术,2008(04):63-66,75. |
| [40] | 陈海龙,杨晖.反应等离子喷涂TiN的反应过程及涂层形成机理研究[J].热加工工艺,2009(20):104-106. |
| [41] | 冯文然,阎殿然,何继宁,陈光良,顾伟超,张谷令,刘赤子,杨思泽.反应等离子喷涂纳米TiN涂层的显微硬度及微观结构研究[J].物理学报,2005(05):2399-2402. |
| [42] | 姚燚红 .气相反应等离子喷涂 TiN 涂层及性能研究[D].南京:河海大学,2012. |
| [43] | Yihong Yao;Zehua Wang;Zehua Zhou;Shaoqun Jiang;Jia Shao .Study on Reactive Atmospheric Plasma-Sprayed In situ Titanium Compound Composite Coating[J].Journal of Thermal Spray Technology,2013(4):509-517. |
| [44] | 李扬,马静,孟凡曼.反应喷涂制备Ti-B-C-N涂层的研究进展[J].河北科技大学学报,2014(03):261-265. |
| [45] | 马静,阎冬青,胡建文,张欣,李扬.烧结破碎粉末反应等离子喷涂制备TiN基陶瓷涂层[J].金属热处理,2013(05):75-79. |
| [46] | 王从曾.材料性能学[M].北京:北京工业大学出版社,2010 |
| [47] | 陆晨光,阎殿然,董艳春,李凌云,赵春晓.反应等离子喷涂TiN涂层热处理后力学性能研究[J].稀有金属材料与工程,2009(z1):129-132. |
| [48] | 邹东利,阎殿然,何继宁,董艳春.反应等离子喷涂TiN陶瓷涂层[J].材料开发与应用,2006(05):11-13. |
| [49] | 李晓亮,阎殿然,何继宁,董艳春,李香芝,张建新.反应等离子喷涂TiN/AlN涂层在润滑状态下摩擦磨损性能的研究[J].热加工工艺,2006(11):52-54. |
| [50] | 程江波,梁秀兵,王泽华,徐滨士.油润滑条件下FeBSiNb非晶涂层磨损性能研究[J].摩擦学学报,2012(02):119-125. |
| [51] | 冯文然 .反应等离子喷涂纳米 TiN 涂层材料的研究[D].天津:河北工业大学,2006. |
| [52] | 李莎,阎殿然,董艳春,王师,高国旗,张志彬.反应等离子喷涂TiN涂层电化学腐蚀行为[J].北京科技大学学报,2009(09):1147-1151. |
| [53] | 赵雪勃,阎殿然,董艳春,王磊,李莎,陆晨光.反应等离子喷涂TiN涂层热处理后的电化学腐蚀性能[J].材料热处理学报,2012(04):121-126. |
| [54] | Galvanetto E;Borgioli F;Galliano FP;Bacci T .Improvement of wear and corrosion resistance of RPS Ti-TiN coatings by means of thermal oxidation[J].Surface & Coatings Technology,2006(11):3650-3655. |
| [55] | 董艳春,阎殿然,杨勇,张建新,何继宁,于洋.硬脂酸封孔处理纳米TiN的涂层电化学腐蚀行为[J].材料热处理学报,2011(z1):117-120. |
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