采用直流磁控溅射法在石英玻璃基片上制备了Fe51 Pd49纳米颗粒膜,将其在500 ～700℃下进行不同时间的热处理,利用场发射高倍扫描电子显微镜(SEM)、X射线衍射仪(XRD)、振动样品磁强计(VSM)研究了热处理时间、温度对薄膜结构、形貌和磁性能的影响.结果表明,在600℃热处理温度下,随着热处理时间的增加,薄膜由面心立方(fcc)相向面心四方(fct)相转变,fct相的衍射峰逐渐增强,薄膜产生的孔洞随之扩大,膜面由制备态的连续分布转变为不连续的类岛状,并产生了分层,其矫顽力、剩磁比表现出先增大后减小的趋势,最大值分别为0.29 T,0.94.降低热处理温度至550℃,进行3h的热处理后发现样品也能进行充分的fcc-fct相转变,矫顽力也能达到0.29 T,剩磁比为0.90.本研究有效降低了FePd合金的相转变温度.
The Fe51Pd49 nanoparticle films were deposited on glass substrates by direct current magnetron sputtering at room temperature,followed by vacuum annealing at 500 ～ 700 ℃ for different time.The influences of different annealed conditions on the microstructure,morphology and magnetic properties were investigated by X-ray diffraction (XRD),scanning electron microscope (SEM) and vibrating sample magnetometer (VSM).The results indicated that the phase transformation occurred from face-centered cubic (fcc) phase to face centered square (fct) phase and the diffraction peak intensity of fct phase increased gradually when the films were annealed at 600 ℃ for longer time,associating with the hole enlarging.Surface morphology of FePd films changed from continuous state to island-like state,consequent forming two layers.As a result,the coercivity and remanence ratio increased first and then decreased,which mounted up to 0.29 T,0.94,respectively.The almost complete fcc-fct phase transition occurred in the film after annealed at 550 ℃ for 3 h.The coercivity reached up to 0.29 T and remanence ratio kept about 0.90.The disorder-order transition temperature evidently reduced in this work.
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