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为了探索Si3 N4陶瓷超声振动铣磨加工中影响加工面表面粗糙度的因素及影响规律,分析了超声振动铣磨头磨粒的运动轨迹,在此基础上建立了加工面表面粗糙度的数学模型;采用该模型对Si3 N4陶瓷超声振动铣磨加工面表面粗糙度进行了预测,并对预测结果进行了试验验证。结果表明:主轴转速、进给速度、磨削深度和超声振幅对 Si3 N4陶瓷加工面表面粗糙度的影响程度由大到小依次减弱;表面粗糙度随主轴转速的增加迅速下降,随磨削深度和进给速度的增加而增大,随振幅的增加呈下降趋势;当Si3 N4陶瓷主要以塑性方式去除时,其加工面表面粗糙度的试验结果和预测结果具有较好的一致性。

To explore the influence factors and influence rules of the machined surface roughness of Si3 N4 ceramic in the ultrasonic vibration milling-grinding process,the abrasive particle trajectories of the ultrasonic vibration grinding wheel were analyzed,and on this basis a mathematical model for the machined surface roughness was established.Using this model,the surface roughness of Si3 N4 ceramic machined by the ultrasonic vibration milling-grinding was predicted and verified by experiments.The results show that the influences of the factors on the machined surface roughness from big to small were in the order of spindle speed,feeding rate,grinding depth and amplitude.The surface roughness decreased rapidly with the increase of the spindle speed,increased with the increase of the grinding depth and the feed speed,and had a downward trend with the increase of the amplitude. When Si3 N4 ceramic was removed mainly by the ductile mode,the predicted machined surface roughness coincided well with the experimental results.

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