采用磁控溅射技术制备了不同铜层厚度的 ZnS/Cu/ZnS 复合薄膜，并在不同温度(100~300℃)下对其进行退火处理，研究了铜层厚度和退火温度对复合薄膜物相、表面形貌、透光率和表面电阻等的影响.结果表明：随着铜层厚度增加，复合薄膜的表面粗糙度逐渐减小后趋于平缓，方块电阻逐渐下降；当铜层厚度为16 nm 时，复合薄膜的最高透光率最大为87％，方块电阻为62．5Ω；随着退火温度升高，复合薄膜中 ZnS 层结晶性增强，表面出现颗粒团簇；在100℃退火后，铜层厚度为16 nm 的复合薄膜的最高透光率为89％，方块电阻为46．3Ω.
ZnS/Cu/ZnS composite film with different copper layer thicknesses were deposited by magnetron sputtering technology,and then was annealed at different temperatures (at the range of 100-300 ℃).The effects of copper layer thickness on phase,surface morphology,optical transmittance and sheet resistance of the film were studied.The results show that,with the increase of copper layer thickness,roughness of composite film gradually decreased and trended to constant,and sheet resistance gradually decreased.When the thickness of copper layer was 1 6 nm,the peak optical transmittance was the highest,and the transmittance was 87% and sheet resistance was 62.5 Ω.With the increase of annealing temperature,the crystalline of ZnS layer improved,and particles cluster was observed.After annealing at 100 ℃,the composite film with copper layer thickness of 1 6 nm owned the maximum optical transmittance of 89% and the lowest resistance of 46.3 Ω.
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