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为了改善MEMS超级电容器膜电极的致密性，通过在聚吡咯（ PPy）中引入苯磺酸钠（ BSNa）和氧化石墨烯（ GO）表面改性功能薄膜，实现聚吡咯薄膜在MEMS超级电容器三维微结构上的均匀沉积．借助扫描电镜（ SEM）、循环伏安测试（ CV）、交流阻抗谱测试（ EIS）、恒流充放电测试（ CP ）等手段对表面改性后的样品进行电化学性能测试．结果表明：当吡咯单体（Py）与BSNa摩尔比为1∶2，GO含量为0．4％时，在－0．4～1．0 V电压范围内，以100 mV／s速率扫描56圈，PPy薄膜的致密性最佳；表面改性可以在很大程度上减轻PPy颗粒的团聚，使得聚合后的PPy分子链排布紧密，形成了规整的网状立体结构；在放电电流为2 mA时，比容量可以达到13．3 mF／cm2，MEMS超级电容器的电化学性能得到改善．

In order to improve the compactness of film electrode for the MEMS supercapacitor, modified PPy film is deposited uniformly on the three?dimensional MEMS surpercapacitors structure by adding quantitative benzenesulfonate ( BSNa) and graphene oxide ( GO) into the electrolyte. The electrochemical performances of the modified samples are tested and analyzed by scanning electron microscopy ( SEM ) , cyclic voltammetry ( CV) , electrochemical impedance spectroscopy( EIS) and constant current charge?discharge test ( CP ) . The results show that the uniform and dense modified PPy film can be fabricated by the cyclic voltammetry in the voltage range of -0.4 ~ 1.0 V, with the scan rate of 100 mV /s and the scan lap of 56, when the ratio of Py to BSNa is 0. 5 and the content of GO is 0. 4wt%. It is observed by SEM that modification can reduce the agglomeration of PPy particles largely, so that PPy molecular chain arranged closely after polymerization to form a regular three?dimensional mesh structure. The capacitance of the samples is up to 13. 3 mF/cm2 at a discharge current of 2 mA by the constant current charge?discharge test and the electrochemical properties of MEMS surpercapacitors is obviously improved.