类金刚石薄膜由于存在很大的残余应力,在实际应用中薄膜易产生裂纹、破裂甚至脱落.这些问题导致类金刚石薄膜在使用过程中过早失效.因此,缓解残余应力是类金刚石薄膜急需解决的问题和实际应用的需要.介绍了类金刚石薄膜残余应力的产生,对国内外调控残余应力的途径以及研究进展进行综述.使用有限元分析法模拟薄膜的残余应力可为类金刚石薄膜的制备和工艺设计提供参考.
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