采用溅射法在石英和316L不锈钢衬底上制备TiO2薄膜.采用X射线衍射仪(XRD)、扫描电镜(SEM)、原子力显微镜(AFM)观察薄膜的微观结构和表面形貌.结果表明:沉积后的TiO2薄膜表面均匀、致密,为锐钛矿结构.600℃退火后,薄膜中有金红石相生成.基于透射谱,计算得到的薄膜光学带隙在3.2eV左右.在PBS模拟体液中,测试材料的动电位极化曲线.结果显示,沉积TiO2薄膜后,材料的耐腐蚀性得到改善.退火后,TiO2薄膜的自腐蚀电位正向移动94mV,自腐蚀电流最小,为4.828μA·cm-2.
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