采用射频磁控溅射装置在Si(111)衬底上分别制备了Pd单膜、LaFeO3单膜和LaFeO3/Pd复合薄膜,利用XRD,SEM,EDS,XPS和电化学测试方法研究了退火处理对LaFeO3/Pd薄膜材料的相结构、形貌、化学组成以及电化学性能的影响.研究结果表明:未退火的溅态LaFeO3薄膜呈无序非晶态结构,随退火温度升高,600℃退火1h后LaFeO3薄膜晶化为钙钛矿型正交结构,此时薄膜晶粒尺寸呈增大趋势;800℃退火时,随退火时间增加,薄膜晶粒尺寸变化不明显,退火前LaFeO3薄膜表面平整、致密,退火后薄膜表面出现裂纹.XPS分析表明,LaFeO3薄膜中的氧以晶格氧、化学吸附氧和物理吸附氧三种结合状态形式存在,退火后LaFeO3薄膜中化学吸附氧转变为晶格氧.电化学测试结果表明,Pd膜电极和LaFeO3膜电极放电容量很低(3.9 ～19 mAh·g-1),而LaFeO3/Pd复合薄膜在退火前后的电极放电容量分别达到50和180.7 mAh·g-1,LaFeO3单膜和LaFeO3/Pd复合薄膜电极的交换电流密度I0分别为为3.36和590.51 mA·g-1.镀Pd后能极大改善和提高LaFeO3/Pd复合膜电极的电催化活性和电化学放电容量.
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