半导体学报（英文版）, 2014, 35(2): 141-146. doi: 10.1088/1674-4926/35/2/026003

基金项目: the Fund Project of Hebei Province Department of Education,China(2011128) the Natural Science Foundation of Hebei Province,China(E2013202247)

Electrochemical investigation of copper chemical mechanical planarization in alkaline slurry without an inhibitor

Keywords： alkaline slurry

参考文献

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