利用金属有机物分解法(MOD)，在 Pt/Ti/SiO2层的 Si (100)衬底上制备了 Bi3.15Nd0.85Ti3O12(BNdT)薄膜，并将其分别在氧气氛围和空气中进行快速退火处理。运用 X 射线衍射仪和场发射扫描电子显微镜对 BNdT 薄膜的晶体结构和形貌进行表征，通过在不同浓度气体氛围下监控材料电阻变化来研究其气敏性能。结果表明，在空气环境退火的 BNdT 薄膜具有多孔微结构和表面粗糙形貌，且退火氛围对 BNdT 薄膜气敏性能有较大的影响。在工作温度为100°C 时，在空气中退火的 BNdT 薄膜对1×10?6乙醇气体具有高的灵敏度，并且对乙醇气体的极限探测浓度达到0.1×10?6。其响应和恢复时间分别约为6 s 和10 s。研究结果为制作高性能乙醇传感器有指导的意义。
Bi3.15Nd0.85Ti3O12 (BNdT) films were deposited on Pt/Ti/SiO2/Si(100) substrates by a metal organic decomposition (MOD) method, and annealed by a rapid thermal annealing process in oxygen atmosphere and in air, respectively. The crystalline structures and morphologies of BNdT films were characterized by X-ray diffraction and field-emission scanning electron microscopy, and the gas sensing properties were measured by monitoring its resistance at different gas concentrations. The results indicate that the BNdT films annealed in air are of porous microstructure and rough surface, and the annealing atmosphere has great influence on gas sensing properties. At an operating temperature of 100 °C, the BNdT films annealed in air are of high response value to 1×10?6 gaseous ethanol, and the detecting limit is as low as 0.1×10?6. The corresponding response and recovery time is about 10 and 6 s, respectively. The results can offer useful guidelines for fabricating high performance ethanol sensors.
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