Single-phase multiferroic BiFeO3 and rare-earth metal of holmium (Ho) doped BiFeO3 nanofilms were prepared on Pt (100)/Ti/SiO2/Si wafer via solution-gelation technique. It was suggested that the lattice distortion happened with the lattice parameter ofddecreasing after doping rare-earth metal of Ho. Meanwhile, the structure of nanofilms transformed from hexahedron phase to tetragonal phase after doping Ho. The analysis on X-ray photoelectron spectroscopy (XPS) indicated that the ratio of Fe3+ cations to Fe2+ cations increased with the increase of binding energy between Fe and O and decrease of that between Bi and O after doping Ho. The present work provided an available way on enhancing multiferroic of BiFeO3 nanofilms.
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