The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temperatures.The nanoporous thin films were prepared by sol-gel technique.It was found that the impedance of the sensor sintered at 600 ℃ changed more than four order of magnitude in the relative humidity (RH) range of 11％-95％ at 25 ℃.The response and recovery time of the sensor were about 13 and 17 s,respectively.The sensor showed high humidity sensitivity,rapid response and recovery,prominent stability,good repeatability and narrow hysteresis loop.These results indicated that Ce-doped nanoporous ZnO thin films can be used in fabricating high-performance humidity sensors.
参考文献
| [1] | Rittersma ZM. .Recent achievements in miniaturised humidity sensors - a review of transduction techniques [Review][J].Sensors and Actuators, A. Physical,2002(2/3):196-210. |
| [2] | Yamazoe N;Shimizu Y .Humidity sensors:principles and applications[J].Sensors and Actuators,1986,10:379. |
| [3] | Li H X;Shi Z M;Liu H W .Humidity sensing properties of La3+/Ce3+-doped TiO2-20 wt.％ SnO2 thin films derived from sol-gel method[J].Journal of Rare Earths,2010,28:123. |
| [4] | Chen Z;Lu C .Humidity sensors:a review of materials and mechanisms[J].SENSOR LETTERS,2005,3:274. |
| [5] | Traversa E .Ceramic sensors for humidity detection:the stateof-the-art and future developments[J].Sensors and Actuators B:Chemical,1995,23:135. |
| [6] | Seiyama T;Yamazoe N;Arai H .Ceramic humidity sensors[J].Sensors and Actuators,1983,4:85. |
| [7] | Yawale S P;Yawale S S;Lamdhade G T .Tin oxide and zinc oxide based doped humidity sensors[J].Sensors and Actuators A:Physical,2007,135:388. |
| [8] | Song, XF;Qi, Q;Zhang, T;Wang, C .A humidity sensor based on KCl-doped SnO2 nanofibers[J].Sensors and Actuators, B. Chemical,2009(1):368-373. |
| [9] | Yeh Y C;Tseng T Y .Electrical properties of K2O-doped Ba0 5Sr0 5TiO3 ceramic humidity sensor[J].IEEE Transactions on Components Hybrids and Manufacturing Technology,1989,12(02):259. |
| [10] | Anbia M;Ashrafizadeh S N .Nanoporous lanthanum tungstate:a viable adsorbent for heavy metal and organic pollutants[J].Chinese Journal of Chemistry,2010,28:1147. |
| [11] | Anbia M;Harirri S A .Adsorptive removal of anionic dyes modified nanoporous silica SBA-3[J].Applied Surface Science,2010,256:3228. |
| [12] | Bargozin H;Amirkhani L;Moghaddas J S;Ahadian M M .Synthesis and application of silica aerogel-MWCNT nanocomposites for adsorption of organic pollutants[J].Sci Iran,2010,17(2F):122. |
| [13] | Anbia M;Khosravi F .Synthesis of nanoporous TiO2 materials using a doubly surfactant system and applying them as useful adsorbent[J].Radiation Effects and Defects in Solids,2009,164:541. |
| [14] | Anbia M;Parvin Z .Desulfurization of fuels by means of a nanoporous carbon adsorbent[J].Chemical engineering Research and Design,2011,6:641. |
| [15] | Zhang YS;Yu K;Shiki OY;Luo LQ;Hu HM;Zhang QX;Zhu ZQ .Detection of humidity based on quartz crystal microbalance coated with ZnO nanostructure films[J].Physica, B. Condensed Matter,2005(1/4):94-99. |
| [16] | Wang XH;Zhang J;Zhu ZQ;Zhu JZ .Humidity sensing properties of Pd2+-doped ZnO nanotetrapods[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(6):3168-3173. |
| [17] | Zhou X F;Zhang J;Jiang T;Wang X H,Zhu Z Q .Humidity detection by nanostructured ZnO:a wireless quartz crystal microbalance investigation[J].Sensors and Actuators A:Physical,2007,135:209. |
| [18] | Yadav BC;Srivastava R;Dwivedi CD;Pramanik P .Moisture sensor based on ZnO nanomaterial synthesized through oxalate route[J].Sensors and Actuators, B. Chemical,2008(1):216-222. |
| [19] | Zhan W C;Guo Y L;Wang Y Q;Guo Y Lu G Z .Synthesis of lanthanum or La-B doped KIT-6 mesoporous materials and their application in the catalytic oxidation of styrene[J].Journal of Rare Earths,2010,28:369. |
| [20] | Hammas I;Horchani K;Férid M .Conduction properties of condensed lanthanum phosphates:La(PO3)3 and LaP5O14[J].Journal of Rare Earths,2010,28:321. |
| [21] | Anbia M,Moosavi;Fard S E .Humidity sensing properties of La3+ and K+ co-doped Ti0.9Sn0,1O2 thin films[J].Journal of Rare Earths,2011,29:668. |
| [22] | Ding J Y;Xiao Y;Han P D;Zhang Q T .Effects of rare earth oxides on dielectric properties of Y2Ti2O7 series ceramics[J].Journal of Rare Earths,2010,28:765. |
| [23] | LI Yan,LIU Xiulin,LI Jiangang.Preparation and characterization of CeO2 doped ZnO nano-tubes fluorescent composite[J].稀土学报（英文版）,2010(04):571-575. |
| [24] | Ge C Q;Xie C S;Cai S Z .Preparation and gas-sensing properties of Ce-doped ZnO thin-film sensors by dip-coating[J].Materials Science and Engineering B,2007,137:53. |
| [25] | Greenspan L .Humidity fixed points of binary saturated aqueous solutions[J].Journal of Research of the National Bureau of Standards,1977,81A:89. |
| [26] | Kulwicki B M .Humidity sensors[J].Journal of the American Ceramic Society,1991,74:697. |
| [27] | Casalbore-Miceli G.;Camaioni N.;Mari CM.;Li Y.;Sun H.;Ling M.;Yang MJ. .Investigations on the ion transport mechanism in conducting polymer films[J].Solid state ionics,2000(3/4):311-321. |
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