Effect of conventional thermal annealing (CTA) and rapid recurrent thermal annealing (RRTA) processes on crystal structure,microstructure,and magnetic properties of the SmCo-based films were investigated.The results indicated that the CTA-treated films exhibited poor permanent magnetic properties,and a low intrinsic coercivity of 72.8 kA/m was observed.Wide hysteresis loop was obtained for the RRTA-treated films,providing better permanent magnetic properties.The intrinsic coercivity reached 312.0 kA/m.According to the X-ray diffraction (XRD) and atomic force microscopy (AFM) results,the magnetic properties of the CTA-treated films and RRTA-treated films were found to be correlated with the crystal structure and microstructure,which were strongly determined by the annealing treatment.CTA treatment led to poor crystallization effects for the films,and a rough surface (RMS=3.47 nm and P-V=35.42 nm) and large grain size of 92.7nm were observed correspondingly.However,the RRTA treatment exhibited great contributions on the crystallization of the films,which is accountable for the smooth surface (RMS=2.047 nm and P-V=16.43 nm) and fine grain size of 60.8 nm.
参考文献
| [1] | Cadieu F J;Cheng T D;Wickramasekara L .Magnetic properties of Sm-Ti-Fe and Sm-Co based films[J].Journal of Applied Physics,1985,57(08):4161. |
| [2] | Cadieu F J;Hedge H;Chen H .High-energy product Sm-Cobased sputtered films,crystal texturing,and magnetic properties[J].Journal of Applied Physics,1990,67(09):4969. |
| [3] | LI Ning,LI Shuai,ZHANG En,WANG Lijin.Magnetic property and microstructure of SmCo magnetic recording films[J].稀土学报（英文版）,2009(05):839-842. |
| [4] | Takei S.;Matsumoto M.;Morisako A. .Effect of underlayer thickness on magnetic properties of SmCo film[J].Journal of Applied Physics,2000(9 Pt.3):6968-6970. |
| [5] | Neu V;Shaheen S A .Sputtered Sm-Co films microstructure and magnetic properties[J].Journal of Applied Physics,1999,86(12):7006. |
| [6] | Romero SA.;Rhen FM.;Neiva AC.;Tabacniks MH.;Missell FP.;Cornejo DR. .Magnetic properties and underlayer thickness in SmCo/Cr films[J].Journal of Applied Physics,2000(9 Pt.3):6965-6967. |
| [7] | H. Kronmuller;D. Goll .Analysis of the temperature dependence of the coercive field of Sm_2Co_(17) based magnets[J].Scripta materialia,2003(7):833-838. |
| [8] | PENG Long,YANG Qinghui,LIU Yingli,SONG Yuanqiang,ZHANG Huaiwu.Application of high-temperature permanent magnets Sm(Co, Fe, Cu, Zr)z in PPM focusing system[J].稀土学报(英文版),2008(05):731-734. |
| [9] | Kazuhiro Ouchi;Naoki Honda .Overview of Latest Work on Perpendicular Recording Media[J].IEEE Transactions on Magnetics,2000(1):16-22. |
| [10] | Budde T.;Gatzen HH. .Patterned sputter deposited SmCo-films for MEMS applications[J].Journal of Magnetism and Magnetic Materials,2002(2):1146-1148. |
| [11] | Budde T;Gatzen HH .Thin film SmCo magnets for use in electromagnetic microactuators[J].Journal of Applied Physics,2006(8):N8304-1-N8304-3-0. |
| [12] | Peng L;Zhang H W;Yang Q H;Li Y X Song Y Q Shen J .Correlation between sputtering parameters and composition of Sm2Co17 based films for microelectromechanical system applications[J].Journal of Applied Physics,2009,105:063915. |
| [13] | 薛刚,彭龙,张怀武.Effect of Sputtering Parameters on Film Composition, Crystal Structure, and Coercivity of SmCo Based Films Deposited on Si （100） Substrates[J].中国物理快报（英文版）,2010(01):231-233. |
| [14] | Peng L;Zhang HW;Xiao JQ .Enhanced coercivity of melt-spun Sm(Co,Fe,Cu,Zr)(z) ribbons annealed by improved process[J].Journal of Magnetism and Magnetic Materials,2008(7):1377-1381. |
| [15] | Peng L;Zhang HW;Liu YL;Xiao JQ .Beneficial effect of rapid recurrent thermal annealing on magnetic properties of SmCo-based films[J].Journal of Magnetism and Magnetic Materials,2008(23):3234-3237. |
| [16] | Zhang H W;Kim H J;Yang S Q .Structure and magneto-optical properties of fine-grain garnet thin films[J].Journal of Magnetism and Magnetic Materials,1995,150:377. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%