Improving the fatigue endurance of lead zirconate titanate thin films through PbO interfacial modification

稀有金属（英文版）, 2011, 30(1): 68-71. doi: 10.1007/s12598-011-0199-3

^1, , ^2, , ^3, , ^4, , ^5, , ^6, , ^7,

1.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

2.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

3.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

4.Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China

5.State Key Laboratory of New Ceramic and Fine Processing, Tsinghua University, Beijing 100084, China

6.Institute of Microelectronics, Tsinghua University, Beijing 100084, China

7.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

基金项目: the Innovative Research Team in Universities(IRT 0509) Beijing Nova Program of China(2007B025) the National Natural Science Foundation of China(10979013) the Major State Basic Research Development Program of China(2009CB623306)

Improving the fatigue endurance of lead zirconate titanate thin films through PbO interfacial modification

LEI Rong ^1, , REN Yanbo ^2, , QIAO Lijie ^3, , GU Hongwei ^4, , YUE Zhenxing ^5, , XIE Dan ^6, , CAO Jiangli ^7,

1.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

2.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

3.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

4.Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China

5.State Key Laboratory of New Ceramic and Fine Processing, Tsinghua University, Beijing 100084, China

6.Institute of Microelectronics, Tsinghua University, Beijing 100084, China

7.Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

Keywords： ferroelectric thin films

The effects of the modification of electrode/ceramic interfaces through a chemical solution deposition-derived PbO buffer layer on the fatigue endurance of lead zirconate titanate (PZT) thin films were investigated. The grain size and the surface roughness of the PZT films increased through PbO interfacial modification. Moreover, the PZT films with PbO interracial modification had a better crystallographic strucrare and no evident secondary phases were observed. While the remanent polarization and dielectric constant were reduced, the fatigue endurance was improved. Based on the results, the mechanism for the fatigue endurance improvement was discussed.

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