The Hardness of Amorphous Si-DLC Films by Molecular Dynamics Simulations

武汉理工大学学报-材料科学版(英文版), 2013, 28(3): 444-448. doi: 10.1007/s11595-013-0710-9

^1, , ^2,

1.School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China

2.School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China;Institute of Higher Energy Physics, Chinése Academy of Sciences, Beijing 100049, China

基金项目: the National Natural Science Foundation of China(50805007) the Fundamental Research Funds for the Central Universities,China(2013JBM074)

The Hardness of Amorphous Si-DLC Films by Molecular Dynamics Simulations

LAN Huiqing ^1, , LIU Can ^2,

1.School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China

2.School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China;Institute of Higher Energy Physics, Chinése Academy of Sciences, Beijing 100049, China

Keywords： diamond-like carbon film

参考文献

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[4]	V. I. Ivashchenko;P. E. A. Turchi;A. Gonis;V. I. Shevchenko;L. A. Ivashchenko .Tribology of amorphous, nanocrystalline, and crystalline slabs of Si, C, and SiC[J].Physical review, B. Condensed matter and materials physics,2005(11):115202.1-115202.6.
[5]	H. U. Jaeger;K. Albe .Molecular-dynamics simulations of steady-state growth of ion-deposited tetrahedral amorphous carbon films[J].Journal of Applied Physics,2000(2):1129-1135.
[6]	Duan YF;Shi HL;Qin LX .Elasticity, band structure, and piezoelectricity of BexZn1-xO alloys[J].Physics Letters, A,2008(16):2930-2933.
[7]	P. Papakonstantinou;J.F Zhao;P. Lemoine;E.T. McAdams;J.A. McLaughlin .The effects of Si incorporation on the electrochemical and nanomechanical properties of DLC thin films[J].Diamond and Related Materials,2002(3-6):1074-1080.

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The Hardness of Amorphous Si-DLC Films by Molecular Dynamics Simulations

参考文献