Effect of the Sputtering Parameters on the Structure and Properties of Cu3N Thin Film Materials

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1.School of Electronic Information＆ Electric Engineering, Changzhou Institute of Technology, Changzhou 213002, China

2.College of Physical Science and Technology, Cental China Normal University, Wuhan 430079, Chinala

3.College of Physical Science and Technology, Cental China Normal University, Wuhan 430079, Chinala

4.College of Physical Science and Technology, Cental China Normal University, Wuhan 430079, Chinala

基金项目: the National Natural Science Foundation of China (60571010)

1.School of Electronic Information＆ Electric Engineering, Changzhou Institute of Technology, Changzhou 213002, China

2.College of Physical Science and Technology, Cental China Normal University, Wuhan 430079, Chinala

3.College of Physical Science and Technology, Cental China Normal University, Wuhan 430079, Chinala

4.College of Physical Science and Technology, Cental China Normal University, Wuhan 430079, Chinala

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