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Some basic quantitative analysis techniques of digitized high resolution atomic image are developed in this paper. We describe how to divide the atomic image into small independent areas with special structure information by the valley mesh segmentation method. The procedure is with regard to the bright contrast spot segmentation of atomic images. We suggest several ways for bright contrast spot localization in images. Calculation routines for peak detection and weighted local position average methods for this purpose are given. (C) 1996 Wiley-Liss, Inc.

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