Magnetron sputtering deposition of Mo and Zr and subsequent annealing were conducted with the motivation to modify the surface hardness of Ti(3)SiC(2). For Mo-coated Ti(3)SiC(2), Si diffused outward into the Mo layer and reacted with Mo to form molybdenum silicides in the temperature range of 1000-1100 degrees C. The MoSi(2) layer, however, cracked and easily spalled off. For Zr-coated Ti(3)SiC(2), Si also diffused outward to form Zr-Si intermetallic compounds at 900-1100 degrees C. The Zr-Si compounds layer had good adhesion with Ti(3)SiC(2) substrate, which resulted in the increased surface hardness. (c) 2010 Elsevier Ltd. All rights reserved.
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