研究了193 nm ArF准分子激光剥蚀系统高空间分辨率下的仪器检出限、ICP质量负载元素分馏、剥蚀深度/束斑直径元素分馏以及基体效应,并在10μm束斑直径下分析了GSD-1G、StHs6/80-G和NIST612中的微量元素。结果表明,仪器检出限随束斑直径的减小而升高,当束斑直径降低至7μm时,部分微量元素的仪器检出限为1~10μg/g。ICP质量负载元素分馏指数与元素第一电离能呈正相关和元素氧化物熔点呈负相关。当剥蚀深度与束斑直径比小于1:1时,由剥蚀深度/束斑直径引起的元素分馏效应可以忽略不计。基体效应研究表明, 50μm与10μm激光束斑下基体效应没有明显的差别。以NIST610为校准物质,Ca为内标元素, 10μm束斑直径下GSD-1G、StHs6/80-G和NIST612中的36种微量元素分析结果与定值基本吻合,分析结果与定值基本匹配。综合考虑在10μm的空间分辨率下,该技术可满足准确分析微量元素的要求。
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